Elevator - RE120

This elevator uses an infrared optical sensor to perform high-speed mapping of the height level of wafers in a cassette on a fixed table.

• Motor operation and through-beam sensor provide accurate mapping for cross-slot and wafer thickness error detection.
• Can perform smooth high-speed searches due to its optimal S-curve acceleration/deceleration controller and its exclusive search controller.
• With the RORZE Masternet Control System, the controller, stepping motor driver, and other electric control modules are all built into the mechanical unit. This means that in the unlikely event of failure, repairs can be performed by simply replacing the modules.
• It is also compatible with round transparent substrates and square substrates.