Elevator - RE119

This elevator is used for elevating/lowering cassettes so that a robot can remove or insert wafers from/into its slots. It can also detect the height level of wafers in a cassette by means of an infrared optical sensor.

• Motor operation and infrared optical sensors which provide accurate mapping of the wafer position.
• Can perform smooth high-speed searches due to its optimal S-curve acceleration/deceleration controller and its exclusive search controller.
• With the RORZE Masternet Control System, the controller, stepping motor driver, and other electric control modules are all built into the mechanical unit. This means that in the unlikely event of failure, repairs can be performed by simply replacing the modules.
• It is also compatible with round transparent substrates and square substrates.