Loadport - RV201

• This loadport is extremely reliable as it has an automatic-position-return system. In case of excessive force while moving or idling, the anti-stall control with encoder-embedded stepping motor on all axes will be activated.
• Wafer damage by robot is prevented as the encoder precisely measures the wafer position during wafer mapping. This accurately detects wafer height and differentiating cross, and can detect any abnormal thicknesses or heights.
• FOUP and Autodoor-FOSB can also be handled.
• External environment particles are shut out by the smooth open/close movement with optimum speed control.
• Enlarged status indicator for better visibility.