Robot - Vacuum Handling Robots

When it comes to vacuum handling robots, RORZE has a wide assortment of high-quality machines. Both high vacuum and minimum rotation radius are achieved by combining a steel type belt arm with a common drive section.

• Small-footprint chamber by boomerang arm with small turning radius.
• Long end effector concept for long-reach and thinly-opened gate.
• High transfer accuracy with tri-axial direct-drive motor and linked-arm.
• High Vacuum achieved by non-rubber-belt structure.

• Musashi Series
• The flagship model of our vacuum handling robots is our Musashi line of robots. These have a very low contamination rate which is realized by the bulkhead structure vacuum direct drive motor developed by RORZE. With a wafer transfer position compensating function which automatically compensates wafer position deviation during wafer transfer, any problems relating to accumulated position deviation from multiple processes can be resolved.
• Musashi Series, RR470, RR480, RZ301