PLVS Series

The PLVS system stands for PoLygon Vacuum System. RORZE offers new capabilities using a wafer transfer module with multi-facets to meet cluster tool needs. With the ability to handle wafer transfer accurately this system can compensate for possible wafer position errors by utilizing optical sensors and highly accurate robots and vacuum aligners.

• Optimum Concepts
• Minimum footprint with the most effective transfer dimensions.
• Great throughput by using a highly effective transfer sequence with EFEM and process module.
• Platform designed with the highest quality vacuum robot.

• Various Options
• Auto-Teaching function for simplified maintenance work.
• Wafer alignment function for correcting accumulated errors made by the process module.
• Wafer monitoring function for cracks and chips.
• Minienvironment monitoring function for periodical maintenance and failure prevention.