Sorter

The wafer sorters from RORZE are one of the leading in the industry and they are well known for extreme cleanliness, reliability, and accuracy.

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• Consist of high speed with minimum space, vibration, and noise.
• SEMI M12, T7, and M1.15 compliant.
• It can read both sides of the wafer. (Top and reverse side)
• A combination of optical and image processing provides a high resolution for ID recognition.
• A pressure separation plate was installed to ensure positive pressure within the sorter, to aid in decreasing particle generation within the transfer area.
• By using a single-arm, dual finger robot, wafers are swiftly transferred. The sorter is equipped with a RR-734 side-reach robot, therefore no x-table is necessary.
• The sorter is equipped with a RR-734 side-reach robot, therefore no x-table is necessary.
• The robot is designed with a negative pressure, which allows no particle generation from the robot, achieving Class 1 Cleanroom Standards.
• RORZE’s new model of controllers is able to provide optimal acceleration/deceleration of the robot.