Reticle Loadport

RETICLE BOX LOAD PORT

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• Driver mode used cylinder on the unlock, open device which makes it easier on controlling and maintenance area.
• Add position guiding function and drop-proof prevention for earthquake.
• Through RC500 control system on reticle sorter, by using modulation on I/O to make it more convenient on maintenance and service task
• Utilize motor encoding signal, photo electricity and magnetic sensor to make sure every act’s location. It makes more stable and safer during the transferring process.
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• Video